Specialised Equipment

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Available for commercial or academic use (charges may be levied). To arrange access contact:

Gordon Brown
Centre for Microsystems and Photonics
Dept. of Electronic & Electrical Engineering
University of Strathclyde
204 George Street
Glasgow
G1 1XW
UK

Tel: +44 (0) 141 548 4037
Fax:+44 (0) 141 548 2926
e-mail: gordon.brown@eee.strath.ac.uk

Excimer laser micromachining system - Exitech M2000

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The excimer laser provides pulses of radiation with high peak power (10 MW) at a wavelength (248nm KrF) that causes photoablation - the removal of material with minimal heat damage. Computer-controlled motion of the work piece and synchronisation with the laser allows 3D shapes to be formed. Suitable materials: polymers, ceramics, thin metal films.

Scanning Electron Microscope (SEM) - Hitachi S-3000N

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The SEM provides magnification up to 300,000 times with a resolution of 3 nm. Non-conducting specimens, such as polymers can be viewed without the need to first cover with a thin film of conducting material (metal or carbon). A temperature controlled sample holder (-25 to 50°C) is available that allows wet (biological) specimens to be viewed without fixing or drying.

Ultra-High-Speed Camera - Cordin 220-8

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This camera has 8 channels each fitted with an image intensifier. It can be synchronised with the device under test and a pulsed light source. Images can be obtained with exposure times down to 5 ns and at a rate up to 10 million frames per second. The camera is shown attached to a microscope but it can be detached for observing large objects.

High-Speed Camera - Intensified Roper 4540MX

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This camera has a single channel, fitted with an image intensifier. It can be synchronised with the device under test. Images can be obtained with exposure times down to 5 ns and at a rate up to 40,000 frames per second. A maximum of 130,000 images can be stored in the camera and then transferred to a computer. The camera is shown attached to a microscope but it can be detached for observing large objects.

Optical Surface Profiler - Veeco NT1000

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The profiler uses white light interferommetry to measure heights and roughnesses of surfaces, with a vertical resolution of a few nm.

Dynamic Optical Surface Profiler - Veeco NT1100 with dynamic DMEMS measurement option

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This is an advanced version of the NT1000 profiler that allows heights and roughness to be measured on objects vibrating at frequencies up to 1 MHz. The system includes image processing software that allows in-plane motion to be measured on the nanometer scale.

Stylus Surface Profiler - Dektak Series 6M

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The profiler drags a stylus across the sample and by measuring the vertical motion of the stylus it determines the roughness of the surface and the height of features on the surface.

Scanning Probe Microscope - Veeco Explorer

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This type of microscope allows the visualisation of many physical properties of materials on the nanometer scale. Properties such as topography, magnetisation and thermal conductivity can be examined

RF Probe Station

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Cascade Microtech Summit 9000 Probe Station with Agilent Technologies N5230A Vector Network Analyser.  Allows RF devices to be characterised over the range 10 MHz to 40 GHz.

Microscope Coupled Vibrometer

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The dynamic perfomance of devices can be studied on the microscopic scale with this apparatus. It allows the velocity and displacment of discrete points to be measured while the object is vibrating up to about 1 MHz.