MEMS Sensor System

This sensor system is used for relative humidity measurement.


We have developed a reconfigurable MEMS sensor-based monitoring system that can be deployed in various engineering applications. The sensor module has a small dimension of approx. 1cm2, which allows it to be installed in restrained space. Up to 8 sensors can be installed to measure the (soil) relative humidity simultaneously at different locations. The MEMS sensors can be encapsulated in polyurethane for their long-term reliability in humid environment. The RH sensor has a typical accuracy of ±1.8% between 10% and 80% RH.


We can provide calibrated RH sensor monitoring system based on the specific conditions of the sensing environment. Both hardware and software support can be given on a case-to-case basis. The system can be designed for long-term usage.